Effect of laser fluence on the growth of Mo films prepared by a pulsed laser deposition method

被引：0
|
作者：
Lei, Jiehong [1 ]
机构：
[1] West China Normal Univ, Phys & Elect Informat Inst, Nanchong 637002, Peoples R China
来源：
APPLIED MATERIALS AND TECHNOLOGIES FOR MODERN MANUFACTURING, PTS 1-4 | 2013年 / 423-426卷
关键词：
metals; thin films; laser deposition; atomic force microscopy; X-ray diffraction; surface properties; SOFT; ENERGY;
D O I：
10.4028/www.scientific.net/AMM.423-426.780
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Molybdenum films with flat and smooth surfaces were prepared on Si (100) substrates using a pulsed laser deposition method, results indicate that increased laser fluence results in narrower diffraction peak, higher surface roughness, and transition from amorphous state into polycrystalline state with gradually increased grain size. The growth mechanism of the films and the effects of particle energy on the growth of the films are discussed based on an analysis of the changes in the crystallization process with laser fluence.
引用
收藏
页码：780 / 783
页数：4
相关论文
共 50 条
  • [21] Laser-fluence effects on NbNx thin films fabricated by pulsed laser deposition
    Farha, Ashraf Hassan
    Er, Ali Oguz
    Ufuktepe, Yuksel
    Elsayed-Ali, Hani E.
    MATERIALS CHEMISTRY AND PHYSICS, 2012, 132 (2-3) : 667 - 672
  • [22] Effect of laser fluence on structural and optical properties of CuxS films grown by pulsed laser deposition at different wavelengths
    Rodriguez-Hernandez, P. E.
    Quinones-Galvan, J. G.
    Melendez-Lira, M.
    Santos-Cruz, J.
    Contreras-Puente, G.
    de Moure-Flores, F.
    MATERIALS RESEARCH EXPRESS, 2020, 7 (01)
  • [23] Effect of incident intensity on films growth in pulsed laser deposition
    Guan Li
    Zhang Duan-Ming
    Li Zhi-Hua
    Tan Xin-Yu
    Li Li
    Liu Dan
    Fang Ran-Ran
    Liu Gao-Bin
    Hu De-Zhi
    CHINESE PHYSICS LETTERS, 2006, 23 (08) : 2277 - 2280
  • [24] Effect of the laser fluence on structural and optical characterization of thin CdS films synthesized by femtosecond pulsed laser deposition
    Tong, X. L.
    Jiang, D. S.
    Liu, L.
    Liu, Z. M.
    Luo, M. Z.
    OPTICS COMMUNICATIONS, 2007, 270 (02) : 356 - 360
  • [25] ZnO thin films prepared by pulsed laser deposition
    Tsoutsouva, M. G.
    Panagopoulos, C. N.
    Papadimitriou, D.
    Fasaki, I.
    Kompitsas, M.
    MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS, 2011, 176 (06): : 480 - 483
  • [26] Ferrimagnetic thin films prepared by pulsed laser deposition
    Guyot, M
    Lisfi, A
    Krishnan, R
    Porte, M
    Rougier, P
    Cagan, V
    APPLIED SURFACE SCIENCE, 1996, 96-8 : 802 - 806
  • [27] Crack growth behavior of silicate thin films prepared by pulsed laser deposition
    Caricato, A. P.
    Fazzi, A.
    Jha, A.
    Kar, A.
    Leggieri, G.
    Luches, A.
    Martino, M.
    Romano, F.
    Shen, S.
    Thomson, R.
    Tunno, T.
    ADVANCED LASER TECHNOLOGIES 2005, PTS 1 AND 2, 2006, 6344
  • [28] Characteristics of CrN films prepared by pulsed laser deposition
    Hirai, M
    Ueno, Y
    Suzuki, T
    Jiang, WH
    Grigoriu, C
    Yatsui, K
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2001, 40 (2B): : 1052 - 1055
  • [29] Yttrium oxide films prepared by pulsed laser deposition
    Zhang, SQ
    Xiao, RF
    JOURNAL OF APPLIED PHYSICS, 1998, 83 (07) : 3842 - 3848
  • [30] Characterization of hydroxyapatite films prepared by pulsed laser deposition
    Bao, Quanhe
    Chen, Chuanzhong
    Wang, Diangang
    Lio, Junming
    CRYSTAL GROWTH & DESIGN, 2008, 8 (01) : 219 - 223
12345