Differential low-coherence interferometry for in situ diagnostics of transparent structures

被引：4
|
作者：
Ivanov, VV [1 ]
Markelov, VA [1 ]
Novikov, MA [1 ]
Ustavshchikov, SS [1 ]
机构：
[1] Russian Acad Sci, Inst Phys Microstruct, Nizhnii Novgorod, Russia
来源：
TECHNICAL PHYSICS LETTERS | 2004年 / 30卷 / 05期
关键词：
Microstructure; Extremal Condition; High Noise; Differential Method; Noise Immunity;
D O I：
10.1134/1.1760864
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
We describe and demonstrate a new differential method capable of measuring the profiles of transparent structures. Based on fiber-optic low-coherence interferometry and possessing a high noise immunity, the proposed technique can be used for the noncontact in situ diagnostics of microstructures under extremal conditions. (C) 2004 MAIK "Nauka/Interperiodica".
引用
收藏
页码：389 / 391
页数：3
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