Specimen preparation for correlating transmission electron microscopy and atom probe tomography of mesoscale features

被引:16
|
作者
Hartshorne, Matthew I. [1 ]
Isheim, Dieter [2 ,3 ]
Seidman, David N. [2 ,3 ]
Taheri, Mitra L. [1 ]
机构
[1] Drexel Univ, Dept Mat Sci & Engn, Philadelphia, PA 19104 USA
[2] Northwestern Univ, Dept Mat Sci & Engn, Evanston, IL 60208 USA
[3] Northwestern Univ, Ctr Atom Probe Tomog, Evanston, IL 60208 USA
基金
美国国家科学基金会;
关键词
Atom probe tomography; Focused ion beam; Transmission electron microscopy; AUSTENITIC STAINLESS-STEEL; GRAIN-BOUNDARY SEGREGATION; MICROSTRUCTURAL EVOLUTION; SCALE; RECONSTRUCTION; SENSITIZATION; PENETRATION; TEMPERATURE; FABRICATION; INSTRUMENT;
D O I
10.1016/j.ultramic.2014.05.005
中图分类号
TH742 [显微镜];
学科分类号
摘要
Atom-probe tomography (APT) provides atomic-scale spatial and compositional resolution that is ideally suited for the analysis of grain boundaries. The small sample volume analyzed in APT presents, however, a challenge for capturing mesoscale features, such as grain boundaries. A new site-specific method utilizing transmission electron microscopy (TEM) for the precise selection and isolation of mesoscale microstructural features in a focused-ion-beam (FIB) microscope lift-out sample, from below the original surface of the bulk sample, for targeted preparation of an APT microtip by FIB-SEM microscopy is presented. This methodology is demonstrated for the targeted extraction of a prior austenite grain boundary in a martensitic steel alloy; it can however, be easily applied to other mesoscale features, such as heterophase interfaces, precipitates, and the tips of cracks. (C) 2014 Elsevier B.V. All rights reserved.
引用
收藏
页码:25 / 32
页数:8
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