Anchored multi-DOF MEMS gyroscope having robust drive mode

被引：1

作者：

Verma, Payal ^{[1
,2
]}

Khonina, S. N. ^{[1
]}

Pavelyev, V. S. ^{[1
]}

Fomchenkov, S. A. ^{[1
]}

Uma, B. V. ^{[2
]}

机构：

[1] Samara Univ, Samara Natl Res Univ, 34 Moskovskoye Shosse, Samara 443086, Russia

[2] RV Coll Engn, Dept Elect & Commun Engn, Bangalore 560059, Karnataka, India

来源：

INTERNATIONAL CONFERENCE ON MICRO- AND NANO-ELECTRONICS 2016 | 2016年 / 10224卷

关键词：

MEMS; Gyroscope; Dynamic Vibration Absorber;

D O I：

10.1117/12.2267115

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

This paper presents the new architecture of 2-DOF (degree-of-freedom) drive mode and 1-DOF sense mode gyroscope with the concept of additional anchoring that retains all the advantages of the Dynamic Vibration Absorber (DVA) concept while being operated at high frequencies. These concepts allow reduction of the bandwidth by varying the coupling parameter during the design, thereby increasing the mechanical sensitivity. In the present design, the anchoring concept has been implemented by adding a central anchor for the sense mass. The steady state response and design concept have been devised using analytical modeling.

引用

页数：8

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