Optimized friction drive controller for a Multi-DOF ultrasonic nanopositioner

被引：0
|
作者：
Ferreira, A [1 ]
Fontaine, JG [1 ]
机构：
[1] Univ Orleans, ENSI, Lab Vis & Robot, F-18000 Bourges, France
来源：
PROCEEDINGS OF THE 2003 IEEE/ASME INTERNATIONAL CONFERENCE ON ADVANCED INTELLIGENT MECHATRONICS (AIM 2003), VOLS 1 AND 2 | 2003年
关键词：
nanopositioner; SWUM; friction drive; force control;
D O I：
暂无
中图分类号：
TP24 [机器人技术];
学科分类号：
080202 ; 1405 ;
摘要：
This paper presents a new generation of compliant multidegree of freedom (DOF) piezoelectric nanopositioner for positioning, transport, alignment of microobjects under the field of view of a microscope. It is based on the cooperation of arrayed direct-drive standing wave ultrasonic actuators (microSWUMs). An optimized friction drive multidimensional controller is proposed based on: (i) an electromagnetic field-based preload controller ensuring optimal preload, (ii) an open-loop PWM controller for self-locking and driving force control and (iii) a resonant frequency compensation.
引用
收藏
页码：1315 / 1320
页数：6
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