Anodic porous alumina structural characteristics study based on SEM image processing and analysis

被引：19

作者：

Raimundo, Daniel S. ^{[1
]}

Caliope, Priscila B. ^{[2
]}

Huanca, Danilo R. ^{[1
]}

Salcedo, Walter J. ^{[1
]}

机构：

[1] Univ Sao Paulo, Escola Politecn, Dept Elect Engn, Microelect Lab, BR-05508900 Sao Paulo, Brazil

[2] Univ Sao Paulo, Escola Politecn, Dept Elect Engn, Lab Sistemas Integraveis, BR-05508900 Sao Paulo, Brazil

来源：

MICROELECTRONICS JOURNAL | 2009年 / 40卷 / 4-5期

关键词：

Mathematical morphology analysis; Anodic porous alumina structures; SEM images; PORES;

D O I：

10.1016/j.mejo.2008.11.024

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The present work reports the porous alumina structures fabrication and their quantitative structural characteristics study based on mathematical morphology analysis by using the SEM images. The algorithm used in this work was implemented in 6.2 MATLAB software. Using the algorithm it was possible to obtain the distribution of maximum, minimum and average radius of the pores in porous alumina structures. Additionally, with the calculus of the area occupied by the pores, it was possible to obtain the porosity of the structures. The quantitative results could be obtained and related to the process fabrication characteristics, showing to be reliable and promising to be used to control the pores formation process. Then, this technique could provide a more accurate determination of pore sizes and pores distribution. (C) 2008 Elsevier Ltd. All rights reserved.

引用

页码：844 / 847

页数：4

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