PLANAR MEMS SUPERCAPACITOR USING CARBON NANOTUBE FORESTS

被引：84

作者：

Jiang, Y. Q. ^{[1
]}

Zhou, Q. ^{[1
]}

Lin, L. ^{[1
]}

机构：

[1] Univ Calif Berkeley, Dept Mech Engn, Berkeley Sensor & Actuator Ctr, Berkeley, CA 94720 USA

来源：

IEEE 22ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2009) | 2009年

关键词：

D O I：

10.1109/MEMSYS.2009.4805450

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Planar micro supercapacitors utilizing vertically aligned carbon nanotube (CNT) forests with the design of interdigital electrodes have been demonstrated. Conductive substrates using Mo/Al/Fe metal stack shows best CNT forest synthesis results with high electrical conductivity and dense CNT structures. Prototype devices show measured specific capacitances about 1000 times higher than those with plain metal electrodes without CNT forests. Furthermore, charging/discharging experiments show over 92% efficiency and very robust cycling stability. As such, we believe these planar MEMS supercapacitors could be applicable in various systems including energy harvesters, pulse-power supplies and advanced microelectronics as on-chip capacitors.

引用

页码：587 / 590

页数：4

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