Heat treatment effects on mechanical properties of Ni-Co alloy thin films

被引：4
|
作者：
Kim, S. J. [1 ]
Jung, H. W. [1 ]
Lee, M. W. [1 ]
Kim, Y. J. [1 ]
Huh, Y. H. [2 ]
Park, J. H. [3 ]
机构：
[1] Korea Univ, Dept Mech Engn, Seoul, South Korea
[2] Korea Res Inst Stand & Sci, Div Ind Metrol, Daejeon, South Korea
[3] KyungSung Univ, Dept Mech & Automot Engn, Busan 48434, South Korea
来源：
MECHANICS OF ADVANCED MATERIALS AND STRUCTURES | 2019年 / 26卷 / 19期
基金：
新加坡国家研究基金会;
关键词：
Ni-Co thin film; microscale tensile test; mechanical property; heat treatment effect; probe;
D O I：
10.1080/15376494.2018.1444217
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Vertical type probe is made by microelectromechanical system (MEMS) process in microscale for high degree of integration and performance. To design reliable probe before manufacturing, mechanical properties in microscale is needed. Also, manufactured probe is heat-treated to release residual stress. In this paper, to understand mechanical properties and heat treatment effect in microscale, tensile tests for Ni-Co alloy thin film is performed using specimen with heat-treated under air. The Ni-Co thin film has some enhanced mechanical properties by heat effect and becomes brittle. The changes of grain size distribution and grain direction are observed through electron back-scattered diffraction (EBSD).
引用
收藏
页码：1589 / 1595
页数：7
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