Strong ultraviolet and green emissions at room temperature from annealed ZnO thin films

被引：31
|
作者：
Agyeman, O
Xu, CN [1 ]
Shi, WS
Zheng, XG
Suzuki, M
机构：
[1] Natl Inst Adv Ind Sci & Technol, Tosu, Saga 8410052, Japan
[2] Saga Univ, Dept Phys, Saga 8408502, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2002年 / 41卷 / 2A期
关键词：
ZnO; photoluminescence; ultraviolet; annealing; thin film; crystallinity;
D O I：
10.1143/JJAP.41.666
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Undoped ZnO thin films were grown by rf magnetron sputtering on quartz-glass substrates and thermally annealed under various conditions such as in vacuum, reducing gas (5% H-2 diluted in Ar), oxygen and argon ambient, up to 1100 degreesC. We observed a strong excitonic (UV) emission peak around 3.26 eV, when the films were annealed in the reducing ambient whilst the films annealed in argon and oxygen showed strong deep-level emission peaks. The dependence of the UV and visible emissions on the film crystallinity and annealing is discussed.
引用
收藏
页码：666 / 669
页数：4
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