Observer-based Sliding Mode Control of a 6-DOF Precision Maglev Positioning Stage

被引：0
|
作者：
Li, Dengfeng [1 ]
Gutierrez, Hector [1 ]
机构：
[1] Florida Inst Technol, Dept Mech & Aerosp Engn, Melbourne, FL 32901 USA
来源：
IECON 2008: 34TH ANNUAL CONFERENCE OF THE IEEE INDUSTRIAL ELECTRONICS SOCIETY, VOLS 1-5, PROCEEDINGS | 2008年
关键词：
D O I：
暂无
中图分类号：
TP18 [人工智能理论];
学科分类号：
081104 ; 0812 ; 0835 ; 1405 ;
摘要：
A six DOF positioning stage that can provide both millimeter range of motion and high accuracy is presented. The proposed solution is based on the use of hybrid maglev actuators to control each DOF, integrated by a decoupling sliding mode controller in combination with a modified passive nonlinear observer. Simulation shows that high accuracy multi-axis motion can be achieved. The workspace of the proposed application is 1116 mu mx1000 mu mx1000 mu m in translation and 13.3 mradx 16.8 mradx13.0 mrad in rotation.
引用
收藏
页码：2482 / 2487
页数：6
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