Design of a 6-DOF Precision Positioning Stage: Kinematic Analysis and Dynamic Modeling

被引：0

作者：

Cai, Kunhai ^{[1
]}

Tian, Yanling ^{[1
]}

Yang, Zhen ^{[1
]}

Shang, Jiangkun ^{[1
]}

机构：

[1] Tianjin Univ, Key Lab Mech Theory & Equipment Design, Minist Educ, Tianjin 300072, Peoples R China

来源：

2015 INTERNATIONAL CONFERENCE ON MANIPULATION, MANUFACTURING AND MEASUREMENT ON THE NANOSCALE (3M-NANO) | 2015年

关键词：

6-DOF stage; Piezoelectric actuators; Kinematic analysis; Dynamic modeling; PARALLEL MECHANISM;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A novel 6-DOF precision positioning system is designed in this paper, which is assembled by two type 3-DOF precision positioning stages. Each stage is driven by three piezoelectric actuators ( PEAs), and guided by three symmetric T-shape hinges and three elliptical flexible hinges, respectively. The kinematics of this 6-DOF system are investigated. According to an effective kinematic model, the transformation matrix are obtained, which provides a useful tool to predict an output displacement. In addition, the dynamic model of the 6-DOF system is established. The PEAs can be treated as a force generator with a built-in spring-damper component. Furthermore, the characteristics of the 6-DOF system are evaluated in this paper by the FEM simulation. The design structure provides the high dynamic bandwidth. Meanwhile, the experiment is performed to verify the 6-DOF stage has a good characteristic.

引用

页码：223 / 228

页数：6

共 50 条

[1] Modeling and controller design of a 6-DOF precision positioning system
Cai, Kunhai
Tian, Yanling
Liu, Xianping
Fatikow, Sergej
Wang, Fujun
Cui, Liangyu
Zhang, Dawei
Shirinzadeh, Bijan
[J]. MECHANICAL SYSTEMS AND SIGNAL PROCESSING, 2018, 104 : 536 - 555
[2] Forward Kinematic Modeling and Analysis of 6-DOF Underwater Manipulator
Khan, Asghar
Quan, Wang Li
[J]. PROCEEDINGS OF 2015 INTERNATIONAL CONFERENCE ON FLUID POWER AND MECHATRONICS - FPM 2015, 2015, : 1093 - 1096
[3] Design and Experiment of 6-DOF Micro-displacement Positioning Stage
Ji, Ruinan
Jin, Jiamei
Zhang, Jianhui
[J]. Zhendong Ceshi Yu Zhenduan/Journal of Vibration, Measurement and Diagnosis, 2019, 39 (06): : 1264 - 1270
[4] Design and Analysis of a 6-DOF Monolithic Nanopositioning Stage
Cheng, Lingli
Yu, Jianwei
Yu, Xiaofen
[J]. MEASUREMENT TECHNOLOGY AND INTELLIGENT INSTRUMENTS IX, 2010, 437 : 61 - +
[5] Dynamic Modeling and Analysis for 6-DOF Industrial Robots
Li, Yingjie
Na, Jing
Gao, Guanbin
[J]. PROCEEDINGS OF 2020 IEEE 9TH DATA DRIVEN CONTROL AND LEARNING SYSTEMS CONFERENCE (DDCLS'20), 2020, : 247 - 252
[6] Kinematic modeling and validation of a 6-DOF industrial robot
Sun, Guo-Qing
Gao, Guan-Bin
[J]. PROCEEDINGS OF THE 2015 5TH INTERNATIONAL CONFERENCE ON COMPUTER SCIENCES AND AUTOMATION ENGINEERING, 2016, 42 : 218 - 221
[7] Kinematic Analysis of Novel 6-DOF Robot
Kheylo, Sergey, V
Tsarkov, Andrey, V
Garin, Oleg A.
[J]. ADVANCES IN ARTIFICIAL SYSTEMS FOR MEDICINE AND EDUCATION III, 2020, 1126 : 442 - 450
[8] System identification of a novel 6-DOF precision positioning table
Fung, Rong-Fong
Lin, Wang-Chi
[J]. SENSORS AND ACTUATORS A-PHYSICAL, 2009, 150 (02) : 286 - 295
[9] Observer-based Sliding Mode Control of a 6-DOF Precision Maglev Positioning Stage
Li, Dengfeng
Gutierrez, Hector
[J]. IECON 2008: 34TH ANNUAL CONFERENCE OF THE IEEE INDUSTRIAL ELECTRONICS SOCIETY, VOLS 1-5, PROCEEDINGS, 2008, : 2482 - 2487
[10] Kinematic Influence Coefficient based Dynamic Modeling of a 6-DOF Parallel Manipulator System
Chen, Xiaoguang
Li, Chaofeng
Yang, Jinpeng
Jiao, Shenghai
Dong, Wei
[J]. 2019 WORLD ROBOT CONFERENCE SYMPOSIUM ON ADVANCED ROBOTICS AND AUTOMATION (WRC SARA 2019), 2019, : 134 - 141

← 1 2 3 4 5 →