Mechanical properties of anodic aluminum oxide for microelectromechanical system applications

被引：1
|
作者：
Moreno-Hagelsieb, L. [1 ]
Flandre, D. [1 ]
Raskin, J. -P. [1 ]
机构：
[1] Univ Catholique Louvain, Res Ctr Micro & Nanoscop Mat and Elect Devices, B-1348 Louvain, Belgium
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2009年 / 27卷 / 01期
关键词：
THIN-FILMS; ELASTIC-MODULUS; STRESS; INDENTATION; TEMPERATURE; TOPOGRAPHY; SUBSTRATE; STRAIN;
D O I：
10.1116/1.3025906
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Aluminum oxide features good electrical properties such as high dielectric constant and high breakdown voltage. During these last years it has been introduced for the fabrication of metal oxide semiconductor and metal insulator metal capacitors. In the present paper, the mechanical properties of anodic Al2O3 are addressed as well as its interest for microelectromechanical system applications including membranes or cantilevers for humidity, flow, pressure, or biological sensors. (C) 2009 American Vacuum Society. [DOI: 10.1116/1.3025906]
引用
收藏
页码：542 / 546
页数：5
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