Dielectric properties of random and ⟨100⟩ oriented SrTiO3 and (Ba,Sr)TiO3 thin films fabricated on ⟨100⟩ nickel tapes

被引:114
|
作者
Dawley, JT [1 ]
Clem, PG [1 ]
机构
[1] Sandia Natl Labs, Albuquerque, NM 87185 USA
关键词
D O I
10.1063/1.1516630
中图分类号
O59 [应用物理学];
学科分类号
摘要
Properties are presented for random and enhanced <100> orientation SrTiO3 and BaxSr1-xTiO3 (x=0.33, 0.50, and 0.67) films fabricated on base-metal <100> Ni tapes using a chemical solution deposition approach. Films were crystallized in a reducing atmosphere, which prevented Ni oxidation, but permitted growth of SrTiO3 and BaxSr1-xTiO3 films with dielectric loss tan delta between 0.003 and 0.015. For randomly oriented BaxSr1-xTiO3 (x=0, 0.33, 0.5, and 0.67) films, zero-field 100 kHz dielectric constants ranged from 250 to 420. Films with enhanced <100> orientation exhibited zero-field dielectric constants of 980 to 1500, three times higher than random films. Development of such high dielectric constants on Ni suggests a future method for inexpensive, high performance base-metal electrode capacitor fabrication.
引用
收藏
页码:3028 / 3030
页数:3
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