Surface modification of polyimide film by ion implantation

被引:11
|
作者
Kim, JT
Park, JK [1 ]
Lee, DC
机构
[1] Yuhan Coll, Dept Informat & Commun, Puchon, South Korea
[2] Inha Univ, Dept Elect Engn, Inchon, South Korea
关键词
surface modification; ion implantation; polyimide; wettablility; microhardness;
D O I
10.1002/pi.948
中图分类号
O63 [高分子化学(高聚物)];
学科分类号
070305 ; 080501 ; 081704 ;
摘要
The influence of ion implantation on the surface properties of polyimide was studied. We investigated microhardness, friction, wear and wettablility of polyimide. Energies of 50keV and 200keV were used, with doses ranging from 1 x 10(13) to 1 x 10(16) ion cm(-2). The implanted ion species were B, N and Ar. The microhardness of polyimide increased after implantation for doses higher than 1 x 10(15) ion cm(-2). A reduction of the friction coefficient was in most cases correlated with a reduction of wear. The contact angles of water for B- and N-implanted polyimide decreased, as the doses increased at energies of 50keV and 200keV. As time elapsed, the contact angle for B- and N-implanted polyimide films gradually increased and finally approached the initial value under ambient room conditions. However, the contact angle of Ar-ion-implanted polyimide did not change under ambient room conditions, even after a few months had elapsed. (C) 2002 Society of Chemical Industry.
引用
收藏
页码:1063 / 1065
页数:3
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