Investigation of tribology phenomena by low-coherence fiber-optic interferometry

被引：0
|
作者：
Djinovic, Z [1 ]
Mitic, S [1 ]
Tomic, M [1 ]
Cordes, M [1 ]
Vujanic, A [1 ]
Kment, C [1 ]
机构：
[1] Vienna Tech Univ, Inst Micro & Precis Engn, A-1040 Vienna, Austria
来源：
2004 24TH INTERNATIONAL CONFERENCE ON MICROELECTRONICS, PROCEEDINGS, VOLS 1 AND 2 | 2004年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We propose and analyze a fiber-optic low-coherence interferometric (LCI) method for remote and non-contact investigation of the wearing rate and vibration in a standard pinon-disc-tribology test. Our system is capable to measure displacement of the specimen/pin as well as very small amplitude of vibration of the pin occurring in a standard test. We obtained the pin position resolution better than 100 nm in the range of 400 mum as well as minimal detectable amplitude of the pin vibration of about 10 pm/rootHz.
引用
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页码：227 / 230
页数：4
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