Parameterization of the dielectric function of InxAl1-xAs alloys as a function of composition

被引:5
|
作者
Kim, Tae Jung [1 ]
Park, Jae Chan
Barange, Nilesh S.
Park, Han Gyeol
Kang, Yu Ri
Nam, Koo Hyun
Kim, Young Dong
机构
[1] Kyung Hee Univ, Nanoopt Property Lab, Seoul 130701, South Korea
基金
新加坡国家研究基金会;
关键词
InAlAs; Dielectric function parametric model; Ellipsometry; SPECTROSCOPIC ELLIPSOMETRY; THIN-FILMS; INP; SI;
D O I
10.1016/j.cap.2015.04.020
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We report analytic expressions that accurately represent the dielectric functions epsilon = epsilon(1) + i epsilon(2) of InxAl1-xAs from 1.5 to 6 eV. We use the dielectric function parametric model, which portrays epsilon as a sum of polynomials and can accommodate the asymmetric nature of critical-point transitions. The epsilon spectra were obtained previously by spectroscopic ellipsometry for compositions x = 0, 0.10, 0.43, 0.62, 0.75, and 1. The epsilon data are successfully reconstructed and parameterized in excellent agreement with the data by seven polynomials. Our results allow epsilon to be determined as a continuous function of In composition and energy over the ranges given above, and epsilon can be converted to the complex refractive index using a simple relationship. (C) 2015 Elsevier B.V. All rights reserved.
引用
收藏
页码:S30 / S34
页数:5
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