共 50 条
- [35] Raman spectroscopy of copper oxide films deposited by reactive magnetron sputtering [J]. Technical Physics Letters, 2015, 41 : 1094 - 1096
- [38] Influence of the magnetron on the growth of aluminum nitride thin films deposited by reactive sputtering [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2010, 28 (02): : 193 - 198
- [40] Adhesion analysis for niobium nitride thin films deposited by reactive magnetron sputtering [J]. POWDER METALLURGY AND ADVANCED MATERIALS, 2018, 8 : 212 - 218