Probing thin over layers with variable energy/cluster ion beams

被引:2
|
作者
Spool, A. [1 ]
White, R. [1 ]
机构
[1] Hitachi Global Storage Technol Inc, San Jose, CA 95193 USA
关键词
ToF-SIMS; cluster ion depth profiling; magnetic recording disks; static SIMS;
D O I
10.1016/j.apsusc.2006.02.219
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
A series of carbon-coated magnetic recording disks proved ideal for exploring sampling depth and ion formation trends as a function of variations in energy and cluster size (Au-x) of the primary ion beam, and variations in over coat thickness and type. Ion yield from the underlying metal layer increased with increasing energy and decreasing cluster size of the primary ions. The yields varied nearly linearly with over layer thickness. In contrast, MxCsy depth profiles were unaffected by changes in the primary ion. The samples were fortuitously dosed with dinonyl phthalate, allowing a study similar to prior GSIMS work [I.S. Gilmore, M.P. Seah, J.E. Johnstone, in: A. Berminghoven, R Bertrand, H.-N. Migeon, H.W. Werner (Eds.), Proceedings of the 12th International Conference on SIMS, Elsevier, Brussels, 2000, p. 801]. Ions prominent in the EI mass spectrum, including even electron ions, were more consistently enhanced at lower energies and higher cluster sizes than the primary (M + H)(+) ion. The total secondary ion count was inversely proportional to the film thickness. Secondary electrons, largely originating in the buried metal layer, may be inducing organic ion formation [A.M. Spool, Surf. Interface Anal. 36 (2004) 264]. (c) 2006 Elsevier B.V. All rights reserved.
引用
收藏
页码:6517 / 6520
页数:4
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