Microelectrode patterning of metal films using pulsed UV-laser system

被引：4
|
作者：
Yang, Chih-Chung [1 ]
Hsiao, Wen-Tse [1 ]
Chung, Chien-Kai [1 ]
Tsai, Hsin-Yi [1 ]
Yeh, Jer-Liang Andrew [1 ,2 ,3 ]
Huang, Kuo-Cheng [1 ]
机构：
[1] Natl Appl Res Labs, Instrument Technol Res Ctr, Hsinchu 30076, Taiwan
[2] Natl Tsing Hua Univ, Inst Nanoengn & Microsyst, Hsinchu 30013, Taiwan
[3] Natl Tsing Hua Univ, Dept Power Mech Engn, Hsinchu 30013, Taiwan
来源：
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2014年 / 117卷 / 01期
关键词：
Graphene Oxide; Scanning Speed; Metal Film; Laser Fluence; Electrical Isolation;
D O I：
10.1007/s00339-014-8315-5
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
This study presents a maskless method to conduct microelectrode patterning of metal films using pulsed UV-laser-writing technology. The experimental procedures involved designing the ablation region of a glass substrate, ablation path planning, and determining detailed laser-writing parameters. The various parameters used in a UV-laser-writing system were investigated and analyzed using an optical microscope and a three-dimensional confocal laser scanning microscope. This technique was successfully applied in patterning aluminum (Al) thin film on a glass substrate for use in microheater devices. The measurements of electrical resistance and temperature distribution on the substrate demonstrated that no short circuiting occurred in the microheater, confirming the quality of the electrical isolation values.
引用
收藏
页码：161 / 168
页数：8
相关论文
共 50 条
  • [41] Metal cathode patterning for OLED by nanosecond pulsed laser ablation
    Chen Liu
    Guang-xi Zhu
    De-ming Liu
    [J]. Optoelectronics Letters, 2006, 2 (6) : 426 - 429
  • [42] Metal cathode patterning for OLED by nanosecond pulsed laser ablation
    LIU Chen~ 1*
    2. Institute of Optoelectronics Science and Engineering
    [J]. Optoelectronics Letters, 2006, (06) : 426 - 429
  • [43] Metal cathode patterning for OLED by nanosecond pulsed laser ablation
    Liu Chen
    Zhu Guang-xi
    Liu De-ming
    [J]. OPTOELECTRONICS LETTERS, 2006, 2 (06) : 426 - 429
  • [44] Development of a TOF measurement system of charge carrier dynamics in diamond thin films using a UV pulsed laser
    Fujita, F.
    Oshiki, Y.
    Kaneko, J. H.
    Homma, A.
    Tsuji, K.
    Meguro, K.
    Yamamoto, Y.
    Imai, T.
    Watanabe, H.
    Teraji, T.
    Kawamura, S.
    Furusaka, M.
    [J]. DIAMOND AND RELATED MATERIALS, 2006, 15 (11-12) : 1921 - 1925
  • [45] Measurement of charge carrier dynamics in diamond thin films using a fast TOF system with a UV pulsed laser
    Oshiki, Y.
    Kaneko, J. H.
    Fujita, F.
    Homma, A.
    Watanabe, H.
    Meguro, K.
    Yamamoto, Y.
    Imai, T.
    Sato, K.
    Tsuji, K.
    Kawamura, S.
    Furusaka, M.
    [J]. DIAMOND AND RELATED MATERIALS, 2008, 17 (4-5) : 833 - 837
  • [46] UV pulsed laser deposition of magnetite thin films
    Paramês, ML
    Mariano, J
    Rogalski, MS
    Popovici, N
    Conde, O
    [J]. MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2005, 118 (1-3): : 246 - 249
  • [47] Pulsed laser deposition of metal and metal multilayer films
    Lunney, James G.
    [J]. Applied Surface Science, 1600, 86 (01): : 79 - 85
  • [48] THE LASER-INDUCED VASCULAR LESION OF CW-ND-YAG-LASER AND PULSED UV-LASER CONCERNING ANGIOPLASTIC PROCEDURES
    LAUFER, G
    WOLLENEK, G
    STANGL, G
    FASOL, R
    ZILLA, P
    DEUTSCH, M
    WOLNER, E
    [J]. THORACIC AND CARDIOVASCULAR SURGEON, 1985, 33 : 70 - 70
  • [49] Influence of UV-laser radiation on the synthesis of DLC films by ECR-plasma-CVD
    Sepold, G
    Stephen, A
    Metev, S
    [J]. DIAMOND AND RELATED MATERIALS, 1999, 8 (8-9) : 1677 - 1681
  • [50] Influence of UV-laser radiation on the synthesis of DLC films by ECR-plasma-CVD
    Sepold, G.
    Stephen, A.
    Metev, S.
    [J]. Diamond and Related Materials, 1999, 8 (08): : 1677 - 1681
12345