Method of small linear displacement determing

被引：0
|
作者：
Popov, AY [1 ]
Belous, WM [1 ]
Churashev, VP [1 ]
Manchenko, LI [1 ]
Mandel, VE [1 ]
Shugailo, YB [1 ]
Tyurin, AV [1 ]
机构：
[1] II Mechnikov State Univ, Sci Res Inst Phys, UA-270100 Odessa, Ukraine
来源：
FOURTH INTERNATIONAL CONFERENCE ON CORRELATION OPTICS | 1999年 / 3904卷
关键词：
three-dimensional hologram; phase shift; subnanometer accuracy; hologram optical elements;
D O I：
10.1117/12.370415
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A method of small linear displacement determination with subnanometre accuracy, which is based on interaction of the interference field of two laser beams with a three-dimensional holographic diffraction grating fastened on the moveable object, was suggested.
引用
收藏
页码：291 / 295
页数：5
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