Method of small linear displacement determing

被引：0

作者：

Popov, AY ^{[1
]}

Belous, WM ^{[1
]}

Churashev, VP ^{[1
]}

Manchenko, LI ^{[1
]}

Mandel, VE ^{[1
]}

Shugailo, YB ^{[1
]}

Tyurin, AV ^{[1
]}

机构：

[1] II Mechnikov State Univ, Sci Res Inst Phys, UA-270100 Odessa, Ukraine

来源：

FOURTH INTERNATIONAL CONFERENCE ON CORRELATION OPTICS | 1999年 / 3904卷

关键词：

three-dimensional hologram; phase shift; subnanometer accuracy; hologram optical elements;

D O I：

10.1117/12.370415

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A method of small linear displacement determination with subnanometre accuracy, which is based on interaction of the interference field of two laser beams with a three-dimensional holographic diffraction grating fastened on the moveable object, was suggested.

引用

页码：291 / 295

页数：5

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