Fabrication of a High Density, High Aspect Ration and Flexible Metal/Polymer Mold with Flexible Polymer Material

被引：0
|
作者：
Lu Haijing [1 ]
Ang Xiao Fang [1 ]
Liu Hongping [1 ]
Sun Zheng [1 ]
Wei Jun [1 ]
机构：
[1] Singapore Inst Mfg Technol, Singapore 638075, Singapore
来源：
2010 11TH INTERNATIONAL CONFERENCE ON ELECTRONIC PACKAGING TECHNOLOGY & HIGH DENSITY PACKAGING (ICEPT-HDP) | 2010年
关键词：
D O I：
10.1109/ICEPT.2010.5582416
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A flexible polymer is considered as an alternative of low-cost mold materials. Molds with a high density aspect ratio, smooth surface, vertical sidewalls and lightweight have been fabricated and it is easy-to-use features in the hot embossing process. The fabricated flexible metal/polymer molds are expected to have the same quality as silicon or Ni-mold has. This also indicated that the flexible metal/polymer mold could be used for thermoplastic polymer patterning with high fidelity and low cost. Using the flexible metal/polymer mold, 10um and 5um structures were fabricated.
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收藏
页码：839 / 842
页数：4
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