3D sensors and micro-fabricated detector systems

被引：5
|
作者：
Da Via, Cinzia [1 ]
机构：
[1] Univ Manchester, Sch Phys & Astron, Manchester M13 9PL, Lancs, England
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 2014年 / 765卷
基金：
美国国家卫生研究院;
关键词：
3D silicon sensor; MEMS; 3D integration; ATLAS pixel upgrade; LHC upgrade; FE-I4; Pixels; Radiation hardness. Micro-channel-cooling; 3D printing; SILICON DETECTORS;
D O I：
10.1016/j.nima.2014.05.087
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Micro-systems based on the Micro Electro Mechanical Systems (MEMS) technology have been used in miniaturized low power and low mass smart structures in medicine, biology and space applications. Recently similar features found their way inside high energy physics with applications in vertex detectors for high-luminosity LHC Upgrades, with 3D sensors, 3D integration and efficient power management using silicon micro-channel cooling. This paper reports on the state of this development. (C) 2014 The Author. Published by Elsevier BA/.
引用
收藏
页码：151 / 154
页数：4
相关论文
共 50 条
  • [41] Micro-Fabricated Fluorescence-Activated Cell Sorter
    Cho, Sung Hwan
    Chen, Chun H.
    Tsai, Frank S.
    Lo, Yu-Hwa
    [J]. 2009 ANNUAL INTERNATIONAL CONFERENCE OF THE IEEE ENGINEERING IN MEDICINE AND BIOLOGY SOCIETY, VOLS 1-20, 2009, : 1075 - +
  • [42] W-band micro-fabricated modular klystrons
    Caryotakis, G
    Jongewaard, E
    Kustom, RL
    Luhmann, NC
    Petelin, MI
    Scheitrum, G
    Vlieks, A
    [J]. INTENSE MICROWAVE PULSES V, 1997, 3158 : 129 - 136
  • [43] Micro-fabricated mirrors with finesse exceeding one million
    Jin, Naijun
    Mclemore, Charles A.
    Mason, David
    Hendrie, James P.
    Luo, Yizhi
    Kelleher, Megan L.
    Kharel, Prashanta
    Quinlan, Franklyn
    Diddams, Scott A.
    Rakich, Peter T.
    [J]. OPTICA, 2022, 9 (09): : 965 - 970
  • [44] Characterisation of the dielectrophoretic movement of DNA in micro-fabricated structures
    Bakewell, D
    Morgan, H
    Milner, JJ
    [J]. ELECTROSTATICS 1999, 1999, 163 : 73 - 76
  • [45] Fully micro-fabricated VECSEL at 850nm
    Serkland, Darwin K.
    Geib, Kent M.
    Keeler, Gordon A.
    Peake, Gregory M.
    [J]. VERTICAL-CAVITY SURFACE-EMITTING LASERS XV, 2011, 7952
  • [46] Passive micro-optics sensors for 3D imaging
    Javidi, B
    Frauel, Y
    [J]. UNATTENDED/UNMANNED GROUND, OCEAN, AND AIR SENSOR TECHNOLOGIES AND APPLICATIONS VI, 2004, 5417 : 125 - 131
  • [47] GALVANOPLATED 3D STRUCTURES FOR MICRO SYSTEMS
    LOCHEL, B
    MACIOSSEK, A
    KONIG, M
    QUENZER, HJ
    HUBER, HL
    [J]. MICROELECTRONIC ENGINEERING, 1994, 23 (1-4) : 455 - 459
  • [48] Nano interferometry of 3D micro-structure fabricated by LPVCD
    Zheng, W
    Zheng, H
    Guo, YB
    [J]. PROCEEDINGS OF THE THIRD INTERNATIONAL SYMPOSIUM ON INSTRUMENTATION SCIENCE AND TECHNOLOGY, VOL 2, 2004, : 1344 - 1348
  • [49] Surface Quality Improvement of 3D Microstructures Fabricated by Micro-EDM with a Composite 3D Microelectrode
    Lei, Jianguo
    Jiang, Kai
    Wu, Xiaoyu
    Zhao, Hang
    Xu, Bin
    [J]. MICROMACHINES, 2020, 11 (09)
  • [50] Micro-fabricated thermal flow-rate sensors: the substrate material impact on the device performance and power consumption
    Ferdous Shaun
    Elyes Nefzaoui
    Frederic Marty
    William Cesar
    Tarik Bourouina
    [J]. Microsystem Technologies, 2022, 28 : 1357 - 1364
12345