Precision machining of optical surfaces with subaperture correction technologies MRF and IBF

Precision optical elements are used in a wide range of technical instrumentations. Many optical systems e.g. semiconductor inspection modules, laser heads for laser material processing or high end movie cameras, contain precision optics even aspherical or freeform surfaces. Critical parameters for such systems are wavefront error, image field curvature or scattered light. Following these demands the lens parameters are also critical concerning power and RMSi of the surface form error and micro roughness. How can we reach these requirements? The emphasis of this discussion is set on the application of subaperture correction technologies in the fabrication of high-end aspheres and freeforms. The presentation focuses on the technology chain necessary for the production of high-precision aspherical optical components and the characterization of the applied subaperture finishing tools MRF (magneto-rheological finishing) and IBF (ion beam figuring). These technologies open up the possibility of improving the performance of optical systems.