共 50 条
- [1] Applications of MEMS devices in nanosatellite [J]. Engineering Sciences, 2012, 10 (05) : 33 - 35
- [2] Applications of MEMS devices in nanosatellite [J]. RAST 2005: PROCEEDINGS OF THE 2ND INTERNATIONAL CONFERENCE ON RECENT ADVANCES IN SPACE TECHNOLOGIES, 2005, : 240 - 243
- [3] RF MEMS Devices and Applications [J]. 2015 SBMO/IEEE MTT-S INTERNATIONAL MICROWAVE AND OPTOELECTRONICS CONFERENCE (IMOC), 2015,
- [5] MEMS for medical technology applications [J]. MICROFLUIDICS, BIOMEMS, AND MEDICAL MICROSYSTEMS V, 2007, 6465
- [7] Recent advances in medical applications of MEMS [J]. WESCON - 96, CONFERENCE PROCEEDINGS, 1996, : 60 - 63
- [8] The primary processing of MEMS devices and applications analysis [J]. MATERIALS PROCESSING TECHNOLOGY, PTS 1-3, 2012, 418-420 : 2134 - 2138
- [9] Low voltage CDSEM applications in MEMS devices [J]. METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XVI, PTS 1 & 2, 2002, 4689 : 604 - 615