共 50 条
- [1] Applications of MEMS devices in nanosatellite [J]. Engineering Sciences, 2012, 10 (05) : 33 - 35
- [2] Medical applications for MEMS devices [J]. ISTM/97 - 2ND INTERNATIONAL SYMPOSIUM ON TEST AND MEASUREMENT, CONFERENCE PROCEEDINGS, 1997, : 399 - 404
- [3] RF MEMS Devices and Applications [J]. 2015 SBMO/IEEE MTT-S INTERNATIONAL MICROWAVE AND OPTOELECTRONICS CONFERENCE (IMOC), 2015,
- [4] The primary processing of MEMS devices and applications analysis [J]. MATERIALS PROCESSING TECHNOLOGY, PTS 1-3, 2012, 418-420 : 2134 - 2138
- [5] Low voltage CDSEM applications in MEMS devices [J]. METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XVI, PTS 1 & 2, 2002, 4689 : 604 - 615
- [9] Microsensors, MEMS and their applications in smart structures and devices [J]. SMART MATERIALS AND STRUCTURES, 1999, : 683 - 691
- [10] Acoustic wave based MEMS devices for biosensing applications [J]. BIOSENSORS & BIOELECTRONICS, 2012, 33 (01): : 1 - 9