Cratering on thermosonic copper wire ball bonding

被引:27
|
作者
Wei, TC
Daud, AR
机构
[1] ON Semicond, SCG Ind M Sdn Bhd, Seremban, Malaysia
[2] Univ Kebangsaan Malaysia, Sch Appl Phys, Bangi 43600, Selangor Darul, Malaysia
关键词
bond force; copper wire bonding; silicon cratering; ultrasonic power;
D O I
10.1361/105994902770344088
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Copper wire bonding offers several mechanical and electrical advantages as well as cost saving compared to its gold wire predecessor. Despite these benefits, silicon cratering, which completes the fracture and removal of bond pad underlayers, has been a major hurdle to overcome in copper wire bonding. Copper wire is harder than gold, and thus needs greater ultrasonic power and bond force to bond it onto metal pads such as aluminum. This paper reports a study on the influence of wire materials, bond pad hardness, and bonding-machine parameters (i.e., ultrasonic power and bond force) on silicon cratering phenomenon. Ultrasonic power and z-axis bond force were identified as the most critical bonding machine parameters in silicon cratering defects. A combination of greater bond force and lower ultrasonic power avoids silicon cratering and gives the desired effects. Results also show that a harder bond pad provides relatively good protection from silicon cratering.
引用
收藏
页码:283 / 287
页数:5
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