Structured polysilicon for photonic applications

被引：0
|
作者：
Fleming, JG [1 ]
Lin, SY [1 ]
机构：
[1] Sandia Natl Labs, Albuquerque, NM 87185 USA
来源：
AMORPHOUS AND HETEROGENEOUS SILICON THIN FILMS: FUNDAMENTALS TO DEVICES-1999 | 1999年 / 557卷
关键词：
D O I：
10.1557/PROC-557-615
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Three-dimensional photonic lattices have been fabricated in the infrared using a combination of advanced silicon processes. The structures display bandgaps centered at 12 mu and 1.55 mu.
引用
收藏
页码：615 / 620
页数：6
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