Photoluminescence Imaging of Luminous Paint for Surface Temperature Monitoring

被引:0
|
作者
Kasai, Hirotaka [1 ]
Kameyama, Yoshihiro [1 ]
Hagiwara, Toru [1 ]
Ishikawa, Daisuke [1 ]
Katsumata, Toru [1 ]
Aizawa, Hiroaki [1 ]
Honda, Mitsuo [1 ]
Shibasaki, Masayuki [1 ]
Otsubo, Koichi [1 ]
Komuro, Shuji [1 ]
机构
[1] Toyo Univ, Sensor Photon Res Ctr, Saitama, Japan
关键词
Fluorescence thermometer; Thermo-paint; Phosphor; Luminescence; Surface temperature;
D O I
暂无
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
Temperature monitoring is essentially important for stable control of fabrication processes. In order to develop a convenient 2-dimensional temperature monitoring system using a thermo-paint, photoluminescence (PL) images are observed from the luminous paints at various temperatures. Commercially available and in-house modified luminous paints are evaluated for improving temperature sensitivity and stability of the thermo-paints. Temperature dependences of PL images from various luminous paints are reported for developing temperature monitoring procedure using a thermo-paint.
引用
收藏
页码:838 / 841
页数:4
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