Moving toward full fab automation - In search of the elusive 'lights-out fab'

被引：0

作者：

Moslehi, B ^{[1
]}

机构：

[1] Noblemen Grp, Semicond Technol Res, San Diego, CA USA

[2] Noblemen Grp, Semicond Technol Res, Silicon Valley, CA USA

[3] Noblemen Grp, Semicond Technol Res, Seoul, South Korea

[4] Noblemen Grp, Semicond Technol Res, Portland, OR USA

来源：

MICRO | 2004年 / 22卷 / 07期

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：86 / +

页数：2

共 10 条

[1] Hammering out the details of full fab automation
Hurley, Ken
[J]. Solid State Technology, 2000, 43 (8 SUPPL.)
[2] Hammering out the details of full fab automation
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[J]. SOLID STATE TECHNOLOGY, 2000, : S10 - +
[3] PULLING THE PLUG ON LIGHTS-OUT AUTOMATION
BABB, M
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[4] When and where lights-out automation makes sense
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[J]. Plant Engineering, 2021, 75 (07): : 8 - 10
[5] Human interaction with lights-out automation: A field study
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[J]. THIRD ANNUAL SYMPOSIUM ON HUMAN INTERACTION WITH COMPLEX SYSTEMS - HICS '96, PROCEEDINGS, 1996, : 276 - 283
[6] SEARCH FOR A MOVING TARGET - THE FAB ALGORITHM
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[J]. OPERATIONS RESEARCH, 1983, 31 (04) : 739 - 751
[7] Moving (slowly) toward full automation
Fitzgerald, K
[J]. SOLID STATE TECHNOLOGY, 2004, 47 (08) : 10 - 10
[8] The long journey from standardisation to full automation of a mature 200 mm fab
Heinrich, Harald
Deutschlaender, Arthur
[J]. 2018 29TH ANNUAL SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE (ASMC), 2018, : 353 - 358
[9] The human factor in 'lights-out' automation: Using field study data to identify critical human factors design issues
Mitchell, CM
Thurman, DA
Brann, DM
[J]. PROCEEDINGS OF THE HUMAN FACTORS AND ERGONOMICS SOCIETY 42ND ANNUAL MEETING, VOLS 1 AND 2, 1998, : 364 - 368
[10] E-manufacturing: Interface A deployment, automated decision-making tools essential for full fab automation
不详
[J]. MICRO, 2004, 22 (08): : 42 - +

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