The long journey from standardisation to full automation of a mature 200 mm fab

被引：0

作者：

Heinrich, Harald ^{[1
]}

Deutschlaender, Arthur ^{[2
]}

机构：

[1] Infineon Technol Dresden GmbH Automat, Maintenance & Line Control Factory Automat, Dresden, Germany

[2] Univ Appl Sci Stralsund, Mech Engn & Assembly Technol, Stralsund, Germany

来源：

2018 29TH ANNUAL SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE (ASMC) | 2018年

关键词：

standardization of processes; interfaces; tools and workflows; automation strategy; manufacturing performance; reduction of material flow variability; layout concepts; robotics; automated lot handling; change management; Industrie4.0; digitalisation;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper describes our long journey from the first standardization projects to support a fully automated workflow to three complex automation hardware projects and will include the learnings about the change management within a running fab for all departments. In the end you will see a fully automated running 200 mm fab with similar productivity key performance indicators (KPI) as a standard automated 300 mm fab today, except the wafer size. We developed our general "Automation Principles" for all Infineon frontend and backend sites and start training courses for management, engineers and operators.

引用

页码：353 / 358

页数：6

共 6 条

[1] The Long Journey From Standardization to Fully Fab Automation and More
Heinrich, Harald
Deutschlaender, Arthur
Zoghlami, Feryel
Sen, Okan Kamil
[J]. IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 2019, 32 (04) : 408 - 414
[2] Factory automation migration experience for foundry Fab from 200mm to 300mm
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Yeh, PC
[J]. 2002 SEMICONDUCTOR MANUFACTURING TECHNOLOGY WORKSHOP, 2002, : 278 - 281
[3] IMPLEMENTATION OF A SIMULATION-BASED SHORT-TERM LOT ARRIVAL FORECAST IN A MATURE 200MM SEMICONDUCTOR FAB
Scholl, Wolfgang
Gan, Boon Ping
Lendermann, Peter
Noack, Daniel
Rose, Oliver
Preuss, Patrick
Pappert, Falk Stefan
[J]. PROCEEDINGS OF THE 2011 WINTER SIMULATION CONFERENCE (WSC), 2011, : 1927 - 1938
[4] The Long Journey of ICARUS: From the LAr-TPC Concept to the First Full-Scale Detector
Menegolli, Alessandro
[J]. UNIVERSE, 2023, 9 (02)
[5] Pursuing the increase of factory automation in 200mm frontend manufacturing to manage the changes imposed by the transition from high-volume low-mix to high-mix low-volume production
Heinrich, Harald
Schneider, Germar
Heinlein, Frank
Keil, Sophia
Deutschlaender, Arthur
Lasch, Rainer
[J]. 2008 IEEE/SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE, 2008, : 148 - +
[6] 6 mm short versus 11 mm long inter-foraminal implants in the full-arch rehabilitation of edentulous non-atrophic mandibles: 5-year results from a multicenter randomized controlled trial
Guida, Luigi
Esposito, Umberto
Sirignano, Massimiliano
Torrisi, Paolo
Annunziata, Marco
Cecchinato, Denis
[J]. CLINICAL ORAL IMPLANTS RESEARCH, 2023, 34 (02) : 127 - 136

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