Effect of argon plasma treatment on conductivity of sol-gel fabricated Sb-doped SnO2 thin films

被引：11

作者：

Kololuoma, T ^{[1
]}

Rantala, JT ^{[1
]}

机构：

[1] VTT Elect, FIN-90571 Oulu, Finland

来源：

ELECTRONICS LETTERS | 2000年 / 36卷 / 02期

关键词：

D O I：

10.1049/el:20000174

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The sol-gel method is applied to the fabrication of antimony-doped tin dioxide thin films using SnCl4. 4H(2)O and SbCl3 precursors. The effect of argon plasma treatment on the spin on fabricated thin films is studied as a function of the plasma treatment time. Changes in electrical conductivity are measured by a linear four-point probe method. The maximum increase in electrical conductivity is found to be 290%, from 138 to 400S/cm, and the argon plasma reaction response time for the conductivity increase is fast. Finally, the reasons and mechanism for the noticeable resistivity decrease are discussed.

引用

页码：172 / 173

页数：2

共 50 条

[1] Improved conductivity of Sb-doped SnO2 thin films
Alsac, A. A.
Yildiz, A.
Serin, T.
Serin, N.
[J]. JOURNAL OF APPLIED PHYSICS, 2013, 113 (06)
[2] Optical and structural characteristics of Sb-doped SnO2 thin films grown on Si (111) substrates by Sol-Gel technique
Deng, Hongmei
Kong, Jing
Yang, Pingxiong
[J]. JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2009, 20 (11) : 1078 - 1082
[3] Sol-gel derived Sb-doped SnO2/SiO2 nano-composite thin films for gas sensors
Gu, Zhengtian
Liang, Peihui
Zhang, Weiqing
[J]. MICRO- AND NANOELECTRONICS 2005, 2006, 6260
[4] Drude's model calculation rule on electrical transport in Sb-doped SnO2 thin films, deposited via sol-gel
Geraldo, Viviany
Scalvi, Luis V. A.
Lisboa-Filho, P. N.
Morilla-Santos, C.
[J]. JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 2006, 67 (07) : 1410 - 1415
[5] Preparation and properties of Sb-doped SnO2/metal substrates by sol-gel and dip coating
Seo, M.
Akutsu, Y.
Kagemoto, H.
[J]. CERAMICS INTERNATIONAL, 2007, 33 (04) : 625 - 629
[6] Effect of calcining temperature and time on the characteristics of Sb-doped SnO2 nanoparticles synthesized by the sol-gel method
Zhong, Xiaohua
Yang, Baoping
Zhang, Xiaoliang
Jia, Junhong
Yi, Gewen
[J]. PARTICUOLOGY, 2012, 10 (03) : 365 - 370
[7] Effect of calcining temperature and time on the characteristics of Sb-doped SnO2 nanoparticles synthesized by the sol-gel method
Xiaohua Zhong a
[J]. Particuology, 2012, 10 (03) : 365 - 370
[8] Thermal-frequency dependence study of the sub-band localized states effect in Sb-doped SnO2 based sol-gel thin films
Ammari, A.
Bellal, B.
Zebbar, N.
Benrabah, B.
Trari, M.
[J]. THIN SOLID FILMS, 2017, 632 : 66 - 72
[9] Electron–Electron Interactions in Sb-Doped SnO2 Thin Films
Tülay Serin
Abdullah Yildiz
Necmi Serin
Nurcan Yildirim
Figen Özyurt
Mehmet Kasap
[J]. Journal of Electronic Materials, 2010, 39 : 1152 - 1158
[10] Room temperature ferromagnetism of Mn-doped SnO2 thin films fabricated by sol-gel method
Xiao, Yuhua
Ge, Shihui
Xi, Li
Zuo, Yalu
Zhou, Xueyun
Zhang, Bangmin
Zhang, Li
Li, Chengxian
Han, Xiufeng
Wen, Zhenchao
[J]. APPLIED SURFACE SCIENCE, 2008, 254 (22) : 7459 - 7463

← 1 2 3 4 5 →