Microfabrication and experimental characterization of an Out-of-Plane MEMS switch

This paper presents an approach to improve the performance of a Micro-Electro-Mechanical (MEMS) switch with vertical movement, manufactured using surface micromachining technology. We focused on the investigations of the critical technological dimensions (gap, thickness of the arms) in order to obtain a released, stable mechanical structure and to avoid the stiction effect of the metallic shapes. Technological experiments, Scanning Electron Microscopy (SEM) investigations, CoventorWare and Comsol simulations were performed in order to investigate the electro-thermo-mechanical behaviour of the switch.