Microfabrication and experimental characterization of an Out-of-Plane MEMS switch

被引：0

作者：

Baracu, Angela ^{[1
]}

Muller, Raluca ^{[1
]}

Voicu, Rodica ^{[1
]}

Tibeica, Catalin ^{[1
]}

Dinescu, Adrian ^{[1
]}

Pustan, Marius ^{[2
]}

Birleanu, Corina ^{[2
]}

机构：

[1] Natl Inst Res & Dev Microtechnol IMT Bucharest, Bucharest, Romania

[2] Tech Univ Cluj Napoca, Micro & Nano Syst Lab, Cluj Napoca, Romania

来源：

ROMANIAN JOURNAL OF INFORMATION SCIENCE AND TECHNOLOGY | 2019年 / 22卷 / 02期

关键词：

MEMS switch; thermal actuator; microfabrication; sacrificial layer;

D O I：

暂无

中图分类号：

TP301 [理论、方法];

学科分类号：

081202 ;

摘要：

This paper presents an approach to improve the performance of a Micro-Electro-Mechanical (MEMS) switch with vertical movement, manufactured using surface micromachining technology. We focused on the investigations of the critical technological dimensions (gap, thickness of the arms) in order to obtain a released, stable mechanical structure and to avoid the stiction effect of the metallic shapes. Technological experiments, Scanning Electron Microscopy (SEM) investigations, CoventorWare and Comsol simulations were performed in order to investigate the electro-thermo-mechanical behaviour of the switch.

引用

页码：124 / 134

页数：11

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