GEODESIC: A new and extensible geometry tool and framework with application to MEMS

被引：0

作者：

Wilson, N ^{[1
]}

Wang, K ^{[1
]}

Yergeau, D ^{[1
]}

Dutton, R ^{[1
]}

机构：

[1] Stanford Univ, CISX 332, Stanford, CA 94305 USA

来源：

2000 INTERNATIONAL CONFERENCE ON MODELING AND SIMULATION OF MICROSYSTEMS, TECHNICAL PROCEEDINGS | 2000年

关键词：

geometry; MEMS; solid modeling; levelset; TCAD;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper will detail the capabilities of a new geometric modeling tool, called Geodesic, which is being released in source code form to the general community. In addition to providing geometric operations to create geometry useful in MEMS simulation, it uniquely offers a fully integrated 3-D levelset kernel that permits highly accurate physically based deposition and etching simulation.

引用

页码：716 / 719

页数：4

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