CAD model analysis of the air-gap type TFBAR

被引：0
|
作者：
Kim, KW [1 ]
Yook, JG [1 ]
Park, HK [1 ]
机构：
[1] Yonsei Univ, Dept Elect & Elect Engn, Seoul 120749, South Korea
来源：
MICROWAVE AND OPTICAL TECHNOLOGY LETTERS | 2002年 / 34卷 / 05期
关键词：
CAD model; AlN; air gap; TFBAR;
D O I：
10.1002/mop.10469
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A CAD model for an air-gap-ope TFBAR is presented. Aluminum nitride is used as the piezoelectric material with platinum electrodes. To verify the model, simulated and measured results are compared for various top electrode thicknesses, and the agreement is within 0.5% for the parallel resonance frequency. (C) 2002 Wiley Periodicals, Inc.
引用
收藏
页码：384 / 385
页数：2
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