Tunable threshold voltage and flatband voltage in pentacene field effect transistors

被引:85
|
作者
Wang, Annie [1 ]
Kymissis, Ioannis [1 ]
Bulovic, Vladimir [1 ]
Akinwande, Akintunde I. [1 ]
机构
[1] MIT, Microsyst Technol Lab, Cambridge, MA 02139 USA
关键词
D O I
10.1063/1.2349299
中图分类号
O59 [应用物理学];
学科分类号
摘要
Charged interface states are introduced by UV-ozone treatment of a polymer gate dielectric, parylene, prior to deposition of the organic semiconductor, pentacene, thereby modifying the organic field effect transistor (OFET) operation from enhancement to depletion mode. Quasistatic capacitance-voltage measurements and the corresponding current-voltage characteristics show that the threshold voltage V-T and flatband voltage V-FB can be shifted by over +50 V, depending on the ozone exposure time. This work demonstrates that careful control of the semiconductor-insulator interface state densities is essential to V-T and V-FB control and the fabrication of reliable OFET integrated circuits. (c) 2006 American Institute of Physics.
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页数:3
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