A flat type touch probe sensor using PZT thin film vibrator

被引：0
|
作者：
Kurosawa, MK [1 ]
Higuchi, T [1 ]
Kanda, T [1 ]
Morita, T [1 ]
机构：
[1] Univ Tokyo, Grad Sch Engn, Dept Precis Machinery Engn, Bunkyo Ku, Tokyo 1138656, Japan
来源：
PRECISION ENGINEERING, NANOTECHNOLOGY, VOL. 2 | 1999年
关键词：
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
We have fabricated a touch probe sensor, which has a flat configuration and using PZT thin film vibrator. This sensor is for high-precision surface shape measuring, for example, SPM. The sensor consists of a oscillator vibrating in the longitudinal direction. The vibration was exited and detected by a hydrothermaly deposited PZT thin film device. The length of the vibrator was 9.8 mm, and its resonance frequency was 304.35 kHz. The sensitivity and the resolution were evaluated by experiments. The vertical resolution was estimated to be 2.4 nm.
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页码：176 / 179
页数：4
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