Measurement of non-Maxwellian electron energy distributions in an inductively coupled plasma

被引:36
|
作者
Hori, T
Bowden, MD
Uchino, K
Muraoka, K
机构
[1] Interdisc. Grad. Sch. of Eng. Sci., Kyushu University
关键词
D O I
10.1063/1.117188
中图分类号
O59 [应用物理学];
学科分类号
摘要
The electron energy distribution function (EEDF) in an argon planar inductively coupled plasma was measured by the method of laser Thomson scattering. In a low-pressure discharge, a clear departure from a Maxwellian distribution function was observed; an unambiguous measurement of a non-Maxwellian distribution in a low-density glow discharge. The npn-Maxwellian EEDF became Maxwellian in a higher pressure discharge. These observations were attributed to the lack of randomizing collisions in the low-pressure discharge and the increase in the number of these collisions at higher pressure. (C) 1996 American Institute of Physics.
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页码:3683 / 3685
页数:3
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