A push-pull double-contact MEMS relay fabricated by MetalMUMPs process

被引：5

作者：

Wang, Lifeng ^{[1
]}

Jin, Yue ^{[1
]}

机构：

[1] Southeast Univ, Minist Educ, Key Lab MEMS, Nanjing 210096, Jiangsu, Peoples R China

来源：

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2017年 / 23卷 / 06期

基金：

国家高技术研究发展计划(863计划); 中国国家自然科学基金;

关键词：

SWITCH; MICRORELAYS;

D O I：

10.1007/s00542-016-3001-5

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This document presents a push-pull double-contact MEMS (Micro ElectroMechanical System) relay. The MEMS relay is electrostatic driven and laterally actuating. Two push-pull structures form two parallel contacts for the proposed MEMS relay, which can make the contact resistance of the MEMS relay be smaller. The push and pull actions of the push-pull actuators can be accomplished simultaneously using only one action signal. In addition, high inductance DC bias line and substrate removal are used for additional electrical and/or thermal isolation. The fabrication of the proposed switch is based on the standard MetalMUMPs process. The measured pull-in voltage is 116 V and the switch-ON delay is 44 mu s. Contact resistance of the MEMS relay is less than 1 Omega when the stress voltage exceeds 120 V.

引用

页码：2257 / 2262

页数：6

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