Design of a helicon plasma source for ion-ion plasma production

A helicon plasma system is being designed and developed at CPP-IPR. The design parameters of the system are deduced from the dispersion relation of bounded helicon waves and the required magnetic fields are simulated by using Poisson Superfish code. The Helic code is used to simulate the power deposition profile for various conditions and to investigate the optimum values of chamber parameters for effective coupling of radio frequency (RF) power to plasma. The helicon source system is aimed at carrying out ion ion plasma studies in electronegative gases such as Hydrogen, Oxygen and Chlorine. The system mainly consists of a source chamber in which helicon plasma will be produced by injecting RF power at a frequency of 13.56 MHz through a right helical antenna in presence of a DC magnetic field followed by an expansion chamber in which it is expected to produce negative ions along with the positive ions. Installation of the various parts of the system is in progress. The details of the design and development of the system is piesented in this article. (C) 2017 Elsevier B.V. All rights reserved.