Combinatorial fabrication and study of luminescent nanocrystalline Si particles embedded in a SiO2 matrix

被引：0

作者：

Fonseca, L. F. ^{[1
]}

Resto, O. ^{[1
]}

Weisz, S. Z. ^{[1
]}

Shinar, J. ^{[2
]}

机构：

[1] Univ Puerto Rico, Dept Phys, Rio Piedras, PR 00931 USA

[2] US DOE, Dept Phys & Astron, Ames Lab, Ames, IA 50011 USA

来源：

COMBINATORIAL METHODS AND INFORMATICS IN MATERIALS SCIENCE | 2006年 / 894卷

关键词：

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The combinatorial fabrication of nanocrystalline Si particles embedded in a SiO2 matrix (nc-Si:SiO2) by RF co-sputtering of Si and SiO2 targets is described. The peak of the photoluminescence (PL) spectra of the films varies systematically from 760 to 600 nm, consistent with the presumed systematic variation in the size distribution of the embedded Si particles. The correlation between the optical properties of the samples and the formation parameters is also analyzed.

引用

页码：205 / +

页数：2

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