Design and control of a novel piezo-driven XY parallel nanopositioning stage

被引：33
|
作者：
Zhang, Xiaozhi [1 ]
Zhang, Yulong [1 ]
Xu, Qingsong [1 ]
机构：
[1] Univ Macau, Fac Sci & Technol, Dept Electromech Engn, Ave Univ, Taipa, Macau, Peoples R China
来源：
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2017年 / 23卷 / 04期
关键词：
SLIDING-MODE CONTROL; DISPLACEMENT AMPLIFICATION RATIO; FLEXURE; MECHANISM;
D O I：
10.1007/s00542-016-2854-y
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper presents the mechanism and control design of a modular XY nanopositioning stage employing flexure mechanisms and piezoelectric actuators. A new compact parallel flexure stage with two translational degrees-of-freedom is presented. The dual-stacked bridge-type amplifier is employed by a serial connection of two amplifiers. Static and dynamic analytical modeling of the XY stage are carried out, which are verified by performing finite element analysis simulations. Owing to a larger amplification ratio of the bridge-type amplifier and acceptable decoupling property, the stage exhibits a nearly decoupled two-dimensional large motion. Moreover, the adaptive discrete sliding mode control scheme is devised to achieve precise positioning for the stage. The performance and effectiveness of this presented design are verified by several experimental studies.
引用
收藏
页码：1067 / 1080
页数：14
相关论文
共 50 条
  • [1] Design and control of a novel piezo-driven XY parallel nanopositioning stage
    Xiaozhi Zhang
    Yulong Zhang
    Qingsong Xu
    Microsystem Technologies, 2017, 23 : 1067 - 1080
  • [2] A novel piezo-driven nanopositioning mechanism for precise manipulating
    Ma, Li
    Rong, Weibin
    Sun, Lining
    2007 2ND IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1-3, 2007, : 589 - +
  • [3] Development of a novel piezo-driven parallel-kinematics single crystal silicon micropositioning XY stage
    Yao, Q
    Ferreira, PM
    Mukhopadhyay, D
    SMART SENSORS, ACTUATORS, AND MEMS II, 2005, 5836 : 56 - 66
  • [4] Neural network-based iterative learning control of a piezo-driven nanopositioning stage
    Ling, Jie
    Feng, Zhao
    Chen, Long
    Zhu, Yuchuan
    Pan, Yongping
    PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2023, 81 : 112 - 123
  • [5] Design, Fabrication, and Testing of a New Compact Piezo-Driven Flexure Stage for Vertical Micro/Nanopositioning
    Wu, Zeyi
    Xu, Qingsong
    IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, 2019, 16 (02) : 908 - 918
  • [6] Design of a Novel Piezo-Driven XYZ Compliant Parallel Micro/Nano-Positioning Stage
    Wu, Zeyi
    Xu, Qingsong
    2018 IEEE INTERNATIONAL CONFERENCE ON ROBOTICS AND BIOMIMETICS (ROBIO), 2018, : 1496 - 1501
  • [7] A Piezo-Driven Compliant Nanopositioning Stage with Large Stroke for Micro/Nano Manipulation
    Zhu, Xiaobo
    Wen, Zhijie
    Liu, Pinkuan
    2016 3RD INTERNATIONAL CONFERENCE ON MECHANICS AND MECHATRONICS RESEARCH (ICMMR 2016), 2016, 77
  • [8] Design and Control of a Novel Piezo-Driven Micro-Injector
    Liu, Yilin
    Zhang, Xiaozhi
    Zhang, Yulong
    Xu, Qingsong
    2015 IEEE INTERNATIONAL CONFERENCE ON ROBOTICS AND BIOMIMETICS (ROBIO), 2015, : 1985 - 1990
  • [9] Impact Piezo-Driven Micro Dispenser and Precise Miniature XY Stage
    Irie, Yuuka
    Hirata, Shinnosuke
    Kanamori, Chisato
    Aoyama, Hisayuki
    JOURNAL OF ROBOTICS AND MECHATRONICS, 2015, 27 (03) : 259 - 266
  • [10] Reinforcement Learning-Based Adaptive Control of a Piezo-Driven Nanopositioning System
    Chen, Liheng
    Xu, Qingsong
    IEEE OPEN JOURNAL OF THE INDUSTRIAL ELECTRONICS SOCIETY, 2024, 5 : 28 - 40
12345