A Piezo-Driven Compliant Nanopositioning Stage with Large Stroke for Micro/Nano Manipulation

被引：3
|
作者：
Zhu, Xiaobo [1 ]
Wen, Zhijie [1 ]
Liu, Pinkuan [1 ]
机构：
[1] Shanghai Jiao Tong Univ, Sch Mech Engn, State Key Lab Mech Syst & Vibrat, Shanghai 200240, Peoples R China
来源：
2016 3RD INTERNATIONAL CONFERENCE ON MECHANICS AND MECHATRONICS RESEARCH (ICMMR 2016) | 2016年 / 77卷
关键词：
FLEXURE; DESIGN;
D O I：
10.1051/matecconf/20167701040
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
This paper presents the design, analysis, and testing of a single-axis compliant nanopositioning stage with large stroke driven by piezoelectric actuator for micro/nano manipulation. In the developed stage, a hybrid displacement amplifier integrating two kinds of flexure-based input/output decoupling modules have been developed to achieve a large stroke and precise positioning. The analytical modelling and finite element analysis are given to validate the mechanical performance and a prototype of the proposed stage is fabricated for performance tests. The experimental results show that the developed stage has the travel stroke of 214 mu m with a resolution of 8 nm. It is demonstrated that the stage can be adequate for micro/nano manipulation.
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页数：4
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