Silicon microring resonator connected with submicorn comb actuator

被引：0
|
作者：
Takahashi, K. [1 ]
Kanamori, Y. [1 ]
Hane, K. [1 ]
机构：
[1] Tohoku Univ, Dept Nanomech, Sendai, Miyagi 9808579, Japan
来源：
2008 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS | 2008年
关键词：
microring; silicon photonics; silicon waveguide; comb actuator;
D O I：
10.1109/OMEMS.2008.4607809
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A 500nm wide 260nm thick 63.4 mu m long silicon microring waveguide was suspended in air by connecting to a comb actuator with the low-loss suspension arms. The airgap between the microring and the input/output waveguides was adjusted by a voltage applied to the comb actuator to vary the coupling efficiency. Transmittance from the input to the drop waveguides was varied from 0% at the gap of 750nm to 50% maximum value (about 30dB) at the voltages from 0V to 28V. Under the drop condition, the bandwidth of the drop signal was 0.5nm, corresponding to the Q-value of 3100.
引用
收藏
页码：23 / 24
页数：2
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