The method of semiconductor structure impedance measurement

被引：0
|
作者：
Zaycev, Nikolay G. [1 ]
机构：
[1] Tomsk State Univ Control Syst Radioelect, Tomsk, Russia
来源：
EDM 2006: 7th Annual International Workshop and Tutorials on Electron Devices and Materials, Proceedings | 2006年
关键词：
differentiating operational amplifier; semiconductor structure impedance measurement; three-phase method;
D O I：
暂无
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
A semiconductor structure impedance measurement circuit calculation using the differencing circuit is presented. Also the developed method of measurement of phase difference by three-amplitude method is presented. These presented methods excel by their simplicity and performance.
引用
收藏
页码：315 / 318
页数：4
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