Diamond domain investigation and CVD diamond growth optimization through plasma emission spectroscopy

被引：0
|
作者：
Marinelli, M
Milani, E
Paoletti, A
机构：
来源：
PHYSICS OF DIAMOND | 1997年 / 135卷
关键词：
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：93 / 104
页数：12
相关论文
共 50 条
  • [1] Optical emission spectroscopy of the plasma during CVD diamond growth with nitrogen addition
    Vandevelde, T
    Nesladek, M
    Quaeyhaegens, C
    Stals, L
    THIN SOLID FILMS, 1996, 290 : 143 - 147
  • [2] Optical emission spectroscopy of the plasma during CVD diamond growth with nitrogen addition
    Vandevelde, T.
    Nesladek, M.
    Quaeyhaegens, C.
    Stals, L.
    1996, (290-291)
  • [3] Epitaxial growth of diamond on diamond substrate by plasma assisted CVD
    Kamo, Mutsukazu
    Yurimoto, Hisayoshi
    Sato, Yoichiro
    Applied Surface Science, 1988, 33-34 : 553 - 560
  • [4] EPITAXIAL-GROWTH OF DIAMOND ON DIAMOND SUBSTRATE BY PLASMA ASSISTED CVD
    KAMO, M
    YURIMOTO, H
    SATO, Y
    APPLIED SURFACE SCIENCE, 1988, 33-4 : 553 - 560
  • [5] Terahertz Time-Domain Spectroscopy of CVD Diamond
    Yamamoto, Kohji
    Iwasaki, Hironori
    Tsuji, Shinsei
    Yasuda, Ryouhei
    Fukui, Kazutoshi
    Tani, Masahiko
    Shimozuma, Takashi
    Ito, Satoshi
    Saito, Teruo
    2012 37TH INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER, AND TERAHERTZ WAVES (IRMMW-THZ), 2012,
  • [6] Application of optical emission spectroscopy for the determination of optimal CVD diamond growth parameters in abnormal glow discharge plasma
    Linnik, S. A.
    Gaydaychuk, A. V.
    VACUUM, 2014, 103 : 28 - 32
  • [7] Field Emission from Diamond Needles Produced by CVD Growth
    Kleshch, V., I
    Obraztsov, A. N.
    Purcell, S. T.
    2015 28TH INTERNATIONAL VACUUM NANOELECTRONICS CONFERENCE (IVNC), 2015, : 172 - 173
  • [8] Optical emission spectroscopy for diagnosis of diamond growth and etching processes in microwave plasma
    Yurov, V. Yu.
    Bushuev, E. V.
    Bolshakov, A. P.
    Antonova, I. A.
    Ralchenko, V. G.
    Konov, V. I.
    10TH INTERNATIONAL WORKSHOP 2017 STRONG MICROWAVES AND TERAHERTZ WAVES: SOURCES AND APPLICATIONS, 2017, 149
  • [9] Lithium addition during CVD diamond growth: influence on the optical emission of the plasma and properties of the films
    Sternschulte, H
    Schreck, M
    Stritzker, B
    Bergmaier, A
    Dollinger, G
    DIAMOND AND RELATED MATERIALS, 2000, 9 (3-6) : 1046 - 1050
  • [10] Optical emission diagnostics and film growth during microwave-plasma-assisted diamond CVD
    Lang, T.
    Stiegler, J.
    Von, Kaenel, Y.
    Blank, E.
    1996, Elsevier Ltd (05)
12345