The 19th MicroMechanics Europe Workshop (MME 2008)

被引：2

作者：

Schnakenberg, Uwe ^{[1
]}

机构：

[1] Rhein Westfal TH Aachen, Inst Mat Elect Engn 1, Aachen, Germany

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2009年 / 19卷 / 07期

关键词：

D O I：

10.1088/0960-1317/19/7/070201

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页数：1

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