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Image formation by continuous writing with multi-beam in x-ray nanolithography

被引：0
|
作者：
Toyota, E [1 ]
Washio, M [1 ]
机构：
[1] Waseda Univ, Adv Res Inst Sci & Engn, Shinjuku Ku, Tokyo 1698555, Japan
来源：
MICROPROCESSES AND NANOTECHNOLOGY 2001, DIGEST OF PAPERS | 2001年
关键词：
D O I：
10.1109/IMNC.2001.984129
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：140 / 141
页数：2
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