Image formation by continuous writing with multi-beam in x-ray nanolithography

被引:0
|
作者
Toyota, E [1 ]
Washio, M [1 ]
机构
[1] Waseda Univ, Adv Res Inst Sci & Engn, Shinjuku Ku, Tokyo 1698555, Japan
关键词
D O I
10.1109/IMNC.2001.984129
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:140 / 141
页数:2
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